Semiconductor Manufacturing Precision Humidity Control

Get advice on semi-conductor humdity control

Control of the cleanroom environment

Semiconductors and their manufacturing processes are highly sensitive to humidity levels. Insufficient, excessive and inconsistent humidity levels causes damage and defects. Complete control of indoor air conditions is required.

Maintain optimal conditions

All semiconductor manufacturing processes have to be tightly controlled and so will nearly always take place in a cleanroom environment. Precise control of humidity against set point and stability over a time period is a fundamental requirement.

Minimise failures

A failure at any point during semiconductor manufacturing can be extremely expensive. Humidity control is absolutely necessary for consistent and reproducible production environments.

Absolute quality

The semiconductor industry relies on the highest quality products, materials and processes. Humidity control is a critical part of this.

Semiconductor manufacturing humidity control

Top of page Use cases FAQs

Prevent photoresist dimensional changes

Photoresist is a light-sensitive material used in the photolithography process during semiconductor manufacturing. Its primary purpose is to transfer intricate circuit patterns onto a silicon wafer, which is essential for creating integrated circuits and microchips. These are often referred to as 'tracks'. Complete precision is required as measurements are made in nanometres. Extremely close temperature and humidity control standards are required, as any change in shape or size of the photoresist will destroy the semiconductor.

Humidification - the ideal solution to eliminate ESD

ESD occurs with the sudden flow of electricity between two electrically charged objects coming into contact with one another. When objects holding different charges come into contact, or when the dielectric between them breaks down, a visible spark can be triggered. This will damage the semiconductor and can pose safety concerns for facility operations. Humidifiers add moisture to the air that serves as a natural conductor to dissipate electric charges. When humidity drops below 45% RH - also known as the static threshold, this protection disappears and normal employee activities can lead to objects being damaged by static electricity discharge.

Enhanced indoor air quality and comfort for employees

Humidification and temperature control are critical for employee health and satisfaction. Happy, healthy employees are more productive. Condair has adiabatic, evaporative humidification solutions that not only provide humidification but also support with lowering indoor temperatures in a cost-effective, efficient way.

Custom solutions for unique processes

Production processes and requirements can vary significantly across the world due to the variability of ambient conditions, so it is critical to work with a partner who has a diverse portfolio of solutions available that can be tailored precisely to the demands of each individual application. One particular requirement is control tolerance, often in particular focused on humidity stability against time. There can be a time constant over which variability is allowed. It could be for example +/- 2%RH over a 45 minute period, meaning; from set point to + 2%RH, then back to set point, down to - 2%RH and then back to set point, should be no faster than 45 minutes. Condair has many solutions to support with ultra-high precision control applications, including a wide range of humidifiers, dehumidifiers and reverse osmosis water treatment facilities.

Use cases

Frequently asked questions

Why is humidity control important in semiconductor manufacturing?

What is the ideal humidity level for semiconductor environments?

How does humidity control impact cleanroom standards?

What precision humidity control tolerances can be achieved?

What types of humidifiers and dehumidifiers are suitable for semiconductor manufacturing facilities?

Get free expert advice

If you want to explore your options for humidity control, Condair's expert sales engineers will visit your site, review your project and talk you through their recommendations.

Alternatively, if you would prefer a call or online meeting, our team are always happy to discuss possible solutions and offer free technical advice.